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Method of monitoring photoactive organic molecules in-situ during gas-phase deposition of the photoactive organic molecules

United States Patent

June 23, 2015
View the Complete Patent at the US Patent & Trademark Office
A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.
Forrest; Stephen R. (Ann Arbor, MI), Vartanian; Garen (Ann Arbor, MI), Rolin; Cedric (Lasne, BE)
The Regents of the University of Michigan (Ann Arbor, MI)
13/ 652,593
October 16, 2012
GOVERNMENT RIGHTS This invention was made with government support under DE-SC0005310 awarded by the U.S. Department of Energy. The government has certain rights in the invention.