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Electrostatic MEMS devices with high reliability

United States Patent

8,963,659
February 24, 2015
View the Complete Patent at the US Patent & Trademark Office
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The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.
Goldsmith; Charles L. (Plano, TX), Auciello; Orlando H. (Bolingbrook, IL), Sumant; Anirudha V. (Plainfield, IL), Mancini; Derrick C. (Argonne, IL), Gudeman; Chris (Lompoc, CA), Sampath; Suresh (Santa Barbara, CA), Carlilse; John A. (Romeoville, IL), Carpick; Robert W. (Philadelphia, PA), Hwang; James (Bethlehem, PA)
13/ 114,945
May 24, 2011
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT The United States Government has rights in this invention pursuant to Contract No. DE-FG02-02ER46016 between the U.S. Department of Energy (DOE) and UChicago Argonne, LLC representing Argonne National Laboratory and pursuant to Contract No. MIPR06-W238 between the Defense Advanced Research Projects Agency (DARPA) and UChicago Argonne, LLC representing Argonne National Laboratory.