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Transparent conducting oxides and production thereof

United States Patent

8,734,621
May 27, 2014
View the Complete Patent at the US Patent & Trademark Office
Transparent Conducting Oxide
Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhanced optical properties without substantially decreasing electrical quality.
Gessert; Timothy A. (Conifer, CO), Yoshida; Yuki (Palo Alto, CA), Coutts; Timothy J. (Golden, CO)
Alliance for Sustainable Energy, LLC (Golden, CO)
11/ 718,628
20110084239
January 16, 2007
CONTRACTUAL ORIGIN The United States Government has rights in this invention under Contract No. DE-AC36-99GO10337 between the United States Department of Energy and the National Renewable Energy Laboratory, a Division of the Midwest Research Institute.