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Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector

United States Patent

October 29, 2013
View the Complete Patent at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.
Gessner; Oliver (Albany, CA), Kornilov; Oleg A. (Berlin, DE), Wilcox; Russell B. (El Cerrito, CA)
The Regents of the University of California (Oakland, CA)
12/ 843,773
July 26, 2010
STATEMENT OF GOVERNMENTAL SUPPORT The invention described and claimed herein was made in part utilizing funds supplied by the U.S. Department of Energy under Contract No. DE-AC02-05CH11231. The government has certain rights in this invention.