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Nanopatterns by phase separation of patterned mixed polymer monolayers

United States Patent

February 18, 2014
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
Micron-size and sub-micron-size patterns on a substrate can direct the self-assembly of surface-bonded mixed polymer brushes to create nanoscale patterns in the phase-separated mixed polymer brush. The larger scale features, or patterns, can be defined by a variety of lithographic techniques, as well as other physical and chemical processes including but not limited to etching, grinding, and polishing. The polymer brushes preferably comprise vinyl polymers, such as polystyrene and poly(methyl methacrylate).
Huber; Dale L. (Albuquerque, NM), Frischknecht; Amalie (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
13/ 361,228
January 30, 2012
STATEMENT OF GOVERNMENT INTEREST The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.