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Test surfaces useful for calibration of surface profilometers

United States Patent

December 31, 2013
View the Complete Patent at the US Patent & Trademark Office
Brookhaven National Laboratory - Visit the Office of Technology Commercialization and Partnerships Website
The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer function (IMTF).
Yashchuk; Valeriy V. (Richmond, CA), McKinney; Wayne R. (Concord, CA), Takacs; Peter Z. (Riverhead, NY)
The Regents of the University of California (Oakland, CA), Brookhaven Science Associates, LLC (Upton, NY)
12/ 408,508
March 20, 2009
STATEMENT OF GOVERNMENTAL SUPPORT The invention was made with government support under Contract Nos. DE-AC02-05CH11231 and DE-AC02-98CH10886, both awarded by the United States Department of Energy (DOE). The government has certain rights in the invention.