The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer function (IMTF).
STATEMENT OF GOVERNMENTAL SUPPORT
The invention was made with government support under Contract Nos. DE-AC02-05CH11231 and DE-AC02-98CH10886, both awarded by the United States Department of Energy (DOE). The government has certain rights in the invention.