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Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material

United States Patent

September 3, 2013
View the Complete Patent at the US Patent & Trademark Office
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A very high-Q, low insertion loss resonator can be achieved by storing many overtone cycles of a lateral acoustic wave (i.e., Lamb wave) in a lithographically defined suspended membrane comprising a low damping resonator material, such as silicon carbide. The high-Q resonator can sets up a Fabry-Perot cavity in a low-damping resonator material using high-reflectivity acoustic end mirrors, which can comprise phononic crystals. The lateral overtone acoustic wave resonator can be electrically transduced by piezoelectric couplers. The resonator Q can be increased without increasing the impedance or insertion loss by storing many cycles or wavelengths in the high-Q resonator material, with much lower damping than the piezoelectric transducer material.
Olsson; Roy H. (Albuquerque, NM), El-Kady; Ihab F. (Albuquerque, NM), Ziaei-Moayyed; Maryam (San Francisco, CA), Branch; Darren W. (Albuquerque, NM), Su; Mehmet F. (Albuquerque, NM), Reinke; Charles M. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
12/ 790,303
May 28, 2010
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.