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Additives to silane for thin film silicon photovoltaic devices

United States Patent

September 17, 2013
View the Complete Patent at the US Patent & Trademark Office
Chemical additives are used to increase the rate of deposition for the amorphous silicon film (.alpha.Si:H) and/or the microcrystalline silicon film (.mu.CSi:H). The electrical current is improved to generate solar grade films as photoconductive films used in the manufacturing of Thin Film based Photovoltaic (TFPV) devices.
Hurley; Patrick Timothy (Allentown, PA), Ridgeway; Robert Gordon (Quakertown, PA), Hutchison; Katherine Anne (Sunnyvale, CA), Langan; John Giles (Breinigsville, PA)
Air Products and Chemicals, Inc. (Allentown, PA)
12/ 872,806
August 31, 2010
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OF DEVELOPMENT This invention was made at least in part with funding with the United States Department of Energy under DOE Cooperative Agreement No. DE-EE0000580. The United States Government has certain rights in this invention.