Chemical additives are used to increase the rate of deposition for the amorphous silicon film (.alpha.Si:H) and/or the microcrystalline silicon film (.mu.CSi:H). The electrical current is improved to generate solar grade films as photoconductive films used in the manufacturing of Thin Film based Photovoltaic (TFPV) devices.
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OF DEVELOPMENT
This invention was made at least in part with funding with the United States Department of Energy under DOE Cooperative Agreement No. DE-EE0000580. The United States Government has certain rights in this invention.