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Methods for making thin layers of crystalline materials

United States Patent

July 23, 2013
View the Complete Patent at the US Patent & Trademark Office
Methods for making growth templates for the epitaxial growth of compound semiconductors and other materials are provided. The growth templates are thin layers of single-crystalline materials that are themselves grown epitaxially on a substrate that includes a thin layer of sacrificial material. The thin layer of sacrificial material, which creates a coherent strain in the single-crystalline material as it is grown thereon, includes one or more suspended sections and one or more supported sections.
Lagally; Max G. (Madison, WI), Paskiewicz; Deborah M. (Oregon, WI), Tanto; Boy (Hillsboro, OR)
Wisconsin Alumni Research Foundation (Madison, WI)
13/ 367,600
February 7, 2012
REFERENCE TO GOVERNMENT RIGHTS This invention was made with government support under DE-FG02-03ER46028 awarded by Department of Energy. The government has certain rights in the invention.