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Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators

United States Patent

July 30, 2013
View the Complete Patent at the US Patent & Trademark Office
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A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types of contour-mode resonators including single input, single output resonators, differential resonators, balun resonators, and ring resonators can be used in MEM filter. The MEM filter can have a center frequency in the range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when all of the lattice networks have the same series resonant frequency and the same shunt resonant frequency. The filter bandwidth can be increased up to about 5% by using unique series and shunt resonant frequencies for the lattice networks.
Wojciechowski; Kenneth E. (Albuquerque, NM), Olsson, III; Roy H. (Albuquerque, NM), Ziaei-Moayyed; Maryam (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
13/ 039,029
March 2, 2011
GOVERNMENT RIGHTS This invention was made with Government support under Contract No. DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.