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Phonon-enhanced crystal growth and lattice healing

United States Patent

May 28, 2013
View the Complete Patent at the US Patent & Trademark Office
A system for modifying dislocation distributions in semiconductor materials is provided. The system includes one or more vibrational sources for producing at least one excitation of vibrational mode having phonon frequencies so as to enhance dislocation motion through a crystal lattice.
Buonassisi; Anthony (Cambridge, MA), Bertoni; Mariana (Medford, MA), Newman; Bonna (Cambridge, MA)
Massachusetts Institute of Technology (Cambridge, MA)
12/ 959,795
December 3, 2010
GOVERNMENT SPONSORSHIP INFORMATION This invention was made with Government support under Grant No. DE-FG36-09GO19001, awarded by the Department of Energy. The Government has certain rights in this invention.