Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.
STATEMENT OF FEDERALLY SPONSORED RESEARCH
This invention was made with United States Government support under Grant Nos. DMR-0120967, DMR-0820382, and DMR-0706031 all awarded by the National Science Foundation and Grant No. DE-FG02-06ER46293 awarded by the Department of Energy. The United States Government has certain rights in this invention.