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Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy

United States Patent

8,453,498
June 4, 2013
View the Complete Patent at the US Patent & Trademark Office
An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.
Warren; Oden L. (New Brighton, MN), Asif; Syed Amanula Syed (Bloomington, MN), Cyrankowski; Edward (Woodbury, MN), Kounev; Kalin (Shoreview, MN)
Hysitron, Inc. (Minneapolis, MN)
12/ 886,745
20110005306
September 21, 2010
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention may be related to work done with Government support under Grant No. DE-FG02-04ER83979 awarded by the Department of Energy.