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Method for reuse of wafers for growth of vertically-aligned wire arrays

United States Patent

June 4, 2013
View the Complete Patent at the US Patent & Trademark Office
Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.
Spurgeon; Joshua M. (Pasadena, CA), Plass; Katherine E. (Lancaster, PA), Lewis; Nathan S. (La Canada, CA), Atwater; Harry A. (S. Pasadena, CA)
California Institute of Technology (Pasadena, CA)
13/ 550,395
July 16, 2012
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with government support under grant no. DE-FG02-03ER15483 awarded by the Department of Energy. The government has certain rights in the invention.