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Micro/nano devices fabricated from Cu-Hf thin films

United States Patent

June 4, 2013
View the Complete Patent at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.
Luber; Erik J. (Edmonton, CA), Ophus; Colin (Berkeley, CA), Mitlin; David (Sherwood Park, CA), Olsen; Brian (Edmonton, CA), Harrower; Christopher (Edmonton, CA), Radmilovi ; Velimir (Piedmont, CA)
The Governors of the University of Alberta (Edmonton, Alberta, CA), The Regents of the University of California (Oakland, CA)
13/ 072,343
March 25, 2011
STATEMENT OF GOVERNMENTAL SUPPORT The invention described and claimed herein was made in part utilizing funds supplied by the U.S. Department of Energy under Contract No. DE-AC02-05CH11231. The government has certain rights in this invention.