Patent Number: 8,458,811
Issued: June 4, 2013
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Lawrence Berkeley National Laboratory
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Abstract: An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.
Luber; Erik J. (Edmonton, CA), Ophus; Colin (Berkeley, CA), Mitlin; David (Sherwood Park, CA), Olsen; Brian (Edmonton, CA), Harrower; Christopher (Edmonton, CA), Radmilovi ; Velimir (Piedmont, CA)
The Governors of the University of Alberta (Edmonton, Alberta, CA), The Regents of the University of California (Oakland, CA)
Application Number: 13/
Application Publication Number:
Filed: March 25, 2011
Government Interests: STATEMENT OF GOVERNMENTAL SUPPORT
The invention described and claimed herein was made in part utilizing funds supplied by the U.S. Department of Energy under Contract No. DE-AC02-05CH11231. The government has certain rights in this invention.