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Cubic nitride templates

United States Patent

April 30, 2013
View the Complete Patent at the US Patent & Trademark Office
Los Alamos National Laboratory - Visit the Technology Transfer Division Website
A polymer-assisted deposition process for deposition of epitaxial cubic metal nitride films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures under a suitable atmosphere to yield metal nitride films and the like. Such films can be used as templates for the development of high quality cubic GaN based electronic devices.
Burrell; Anthony K. (Los Alamos, NM), McCleskey; Thomas Mark (Los Alamos, NM), Jia; Quanxi (Los Alamos, NM), Mueller; Alexander H. (Santa Fe, NM), Luo; Hongmei (Los Alamos, NM)
Los Alamos National Security, LLC (Los Alamos, NM)
12/ 321,705
January 22, 2009
STATEMENT REGARDING FEDERAL RIGHTS This invention was made with government support under Contract No. DE-AC52-06NA25396 awarded by the U.S. Department of Energy. The government has certain rights in the invention.