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Fluorine compounds for doping conductive oxide thin films

United States Patent

8,425,978
April 23, 2013
View the Complete Patent at the US Patent & Trademark Office
National Renewable Energy Laboratory - Visit the NREL Technology Transfer Website
Methods of forming a conductive fluorine-doped metal oxide layer on a substrate by chemical vapor deposition are described. The methods may include heating the substrate in a processing chamber, and introducing a metal-containing precursor and a fluorine-containing precursor to the processing chamber. The methods may also include adding an oxygen-containing precursor to the processing chamber. The precursors are reacted to deposit the fluorine-doped metal oxide layer on the substrate. Methods may also include forming the conductive fluorine-doped metal oxide layer by plasma-assisted chemical vapor deposition. These methods may include providing the substrate in a processing chamber, and introducing a metal-containing precursor, and a fluorine-containing precursor to the processing chamber. A plasma may be formed that includes species from the metal-containing precursor and the fluorine-containing precursor. The species may react to deposit the fluorine-doped metal oxide layer on the substrate.
Gessert; Tim (Conifer, CO), Li; Xiaonan (Evergreen, CO), Barnes; Teresa M. (Evergreen, CO), Torres, Jr.; Robert (Parker, CO), Wyse; Carrie L. (Longmont, CO)
Alliance for Sustainable Energy, LLC (Golden, CO)
12/ 884,490
20110070371
September 17, 2010
STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY SPONSORED RESEARCH AND DEVELOPMENT This application includes inventions made under Contract No. DE-AC36-08GO28308 between the Unites States Department of Energy and the National Renewable Energy Laboratory, managed and operated by the Alliance for Sustainable Energy, LLC. This application also includes invention made under Cooperative Research and Development Agreement No. CRD 09-284 between Matheson Tri-Gas, Inc., and the National Renewable Energy Laboratory. The Government has certain rights in these inventions.