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Ablation of film stacks in solar cell fabrication processes

United States Patent

April 2, 2013
View the Complete Patent at the US Patent & Trademark Office
A dielectric film stack of a solar cell is ablated using a laser. The dielectric film stack includes a layer that is absorptive in a wavelength of operation of the laser source. The laser source, which fires laser pulses at a pulse repetition rate, is configured to ablate the film stack to expose an underlying layer of material. The laser source may be configured to fire a burst of two laser pulses or a single temporally asymmetric laser pulse within a single pulse repetition to achieve complete ablation in a single step.
Harley; Gabriel (Mountain View, CA), Kim; Taeseok (Pleasanton, CA), Cousins; Peter John (Menlo Park, CA)
SunPower Corporation (San Jose, CA)
13/ 486,095
June 1, 2012
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This disclosure was made with Government support under Contract No. DEFC36-07GO17043 awarded by the United States Department of Energy.