Skip to Content
Find More Like This
Return to Search

Substrate comprising a nanometer-scale projection array

United States Patent

November 27, 2012
View the Complete Patent at the US Patent & Trademark Office
A method for forming a substrate comprising nanometer-scale pillars or cones that project from the surface of the substrate is disclosed. The method enables control over physical characteristics of the projections including diameter, sidewall angle, and tip shape. The method further enables control over the arrangement of the projections including characteristics such as center-to-center spacing and separation distance.
Cui; Yi (Sunnyvale, CA), Zhu; Jia (Stanford, CA), Hsu; Ching-Mei (Stanford, CA), Connor; Stephen T. (San Francisco, CA), Yu; Zongfu (Stanford, CA), Fan; Shanhui (Stanford, CA), Burkhard; George (Palo Alto, CA)
The Board of Trustees of the Leland Stanford Junior University (Palo Alto, CA)
12/ 948,025
November 17, 2010
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH This invention was made with Government support under contract DE-FG36-08GOI8004 awarded by the Department of Energy. The Government has certain rights in the invention.