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Ultra-thin microporous/hybrid materials

United States Patent

May 29, 2012
View the Complete Patent at the US Patent & Trademark Office
Ultra-thin hybrid and/or microporous materials and methods for their fabrication are provided. In one embodiment, the exemplary hybrid membranes can be formed including successive surface activation and reaction steps on a porous support that is patterned or non-patterned. The surface activation can be performed using remote plasma exposure to locally activate the exterior surfaces of porous support. Organic/inorganic hybrid precursors such as organometallic silane precursors can be condensed on the locally activated exterior surfaces, whereby ALD reactions can then take place between the condensed hybrid precursors and a reactant. Various embodiments can also include an intermittent replacement of ALD precursors during the membrane formation so as to enhance the hybrid molecular network of the membranes.
Jiang; Ying-Bing (Albuquerque, NM), Cecchi; Joseph L. (Albuquerque, NM), Brinker; C. Jeffrey (Albuquerque, NM)
STC.UNM (Albuquerque, NM)
12/ 271,719
November 14, 2008
GOVERNMENT RIGHTS This invention was made with Government support under Grant No. EY-16570 awarded by the National Institutes of Health, and Grant No. DE-FG02-02ER15368 awarded by the Department of Energy. The U.S. Government has certain rights in this invention.