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Method for generating small and ultra small apertures, slits, nozzles and orifices

United States Patent

May 22, 2012
View the Complete Patent at the US Patent & Trademark Office
U.S. Department of Energy - Visit the Office of the Assistant General Counsel for Technology Transfer & Intellectual Property Website
A method and device for one or more small apertures, slits, nozzles and orifices, preferably having a high aspect ratio. In one embodiment, one or more alternating layers of sacrificial layers and blocking layers are deposited onto a substrate. Each sacrificial layer is made of a material which preferably allows a radiation to substantially pass through. Each blocking layer is made of a material which substantially blocks the radiation.
Khounsary; Ali M. (Hinsdale, IL)
The United States of America as represented by the United States Department of Energy (Washington, DC), N/A (
12/ 128,696
May 29, 2008
GOVERNMENT INTERESTS The United States Government has rights in this invention pursuant to Contract No. DE-AC02-06CH11357, between the U.S. Department of Energy (DOE) and UChicago Argonne LLC.