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Planar controlled zone microwave plasma system

United States Patent

October 4, 2011
View the Complete Patent at the US Patent & Trademark Office
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An apparatus and method for initiating a process gas plasma. A conductive plate having a plurality of conductive fingers is positioned in a microwave applicator. An arc forms between the conductive fingers to initiate the formation of a plasma. A transport mechanism may convey process materials through the plasma. A spray port may be provided to expel processed materials.
Ripley; Edward B. (Knoxville, TN), Seals; Roland D. (Oak Ridge, TN), Morrell; Jonathan S. (Knoxvlle, TN)
Babcock & Wilcox Technical Services Y-12, LLC (Oak Ridge, TN)
12/ 555,459
September 8, 2009
GOVERNMENT RIGHTS The U.S. Government has rights to this invention pursuant to contract number DE-AC05-00OR22800 between the U.S. Department of Energy and Babcock & Wilcox Technical Services Y-12, LLC.