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Surface characterization based on optical phase shifting interferometry

United States Patent

August 2, 2011
View the Complete Patent at the US Patent & Trademark Office
Apparatus, techniques and systems for implementing an optical interferometer to measure surfaces, including mapping of instantaneous curvature or in-plane and out-of-plane displacement field gradients of a sample surface based on obtaining and processing four optical interferograms from a common optical reflected beam from the sample surface that are relatively separated in phase by .pi./2.
Mello; Michael (Pasadena, CA), Rosakis; Ares J. (Altadena, CA)
California Institute of Technology (Pasadena, CA)
12/ 203,050
September 2, 2008
FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT The U.S. Government has certain rights in this invention pursuant to Grant No. DE-FG52-06NA26209-T-103505 awarded by Department of Energy and Grant No. N00014-06-1-0730 awarded by Office of Naval Research.