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Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp

United States Patent

May 17, 2011
View the Complete Patent at the US Patent & Trademark Office
The present invention provides methods, systems and system components for transferring, assembling and integrating features and arrays of features having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations. Methods of the present invention utilize principles of `soft adhesion` to guide the transfer, assembly and/or integration of features, such as printable semiconductor elements or other components of electronic devices. Methods of the present invention are useful for transferring features from a donor substrate to the transfer surface of an elastomeric transfer device and, optionally, from the transfer surface of an elastomeric transfer device to the receiving surface of a receiving substrate. The present methods and systems provide highly efficient, registered transfer of features and arrays of features, such as printable semiconductor element, in a concerted manner that maintains the relative spatial orientations of transferred features.
Nuzzo; Ralph G. (Champaign, IL), Rogers; John A. (Champaign, IL), Menard; Etienne (Urbana, IL), Lee; Keon Jae (Tokyo, JP), Khang; Dahl-Young (Urbana, IL), Sun; Yugang (Champaign, IL), Meitl; Matthew (Champaign, IL), Zhu; Zhengtao (Urbana, IL)
The Board of Trustees of the University of Illinois (Urbana, IL)
11/ 423,192
June 9, 2006
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made, at least in part, with United States governmental support awarded by National Science Foundation under grant DMI-0328162, DARPA-funded AFRL-managed Macroelectronics Program Contract FA8650-04-C-7101, the US Department of Energy under grant DEFG02-91-ER45439. The United States government has certain rights in this invention.