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Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates

United States Patent

May 17, 2011
View the Complete Patent at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. A method includes depositing a catalyst particle on a surface of a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate, an end of the aligned elongated nanostructure coupled to the substrate at the deterministically located position; coating the aligned elongated nanostructure with a conduit material; removing a portion of the conduit material to expose the catalyst particle; removing the catalyst particle; and removing the elongated nanostructure to define a nanoconduit.
Melechko; Anatoli V. (Oak Ridge, TN), McKnight; Timothy E. (Greenback, TN), Guillorn; Michael A. (Ithaca, NY), Ilic; Bojan (Ithaca, NY), Merkulov; Vladimir I. (Knoxville, TN), Doktycz; Mitchel J. (Knoxville, TN), Lowndes; Douglas H. (Knoxville, TN), Simpson; Michael L. (Knoxville, TN)
UT-Battelle, LLC (Oak Ridge, TN)
11/ 273,316
November 14, 2005
STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY-SPONSORED RESEARCH OR DEVELOPMENT This invention was made with United States Government support under prime contract No. DE-AC05-00OR22725 to UT-Battelle, L.L.C. awarded by the Department of Energy. The Government has certain rights in this invention.