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Mesoscale hybrid calibration artifact

United States Patent

September 7, 2010
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A mesoscale calibration artifact, also called a hybrid artifact, suitable for hybrid dimensional measurement and the method for make the artifact. The hybrid artifact has structural characteristics that make it suitable for dimensional measurement in both vision-based systems and touch-probe-based systems. The hybrid artifact employs the intersection of bulk-micromachined planes to fabricate edges that are sharp to the nanometer level and intersecting planes with crystal-lattice-defined angles.
Tran; Hy D. (Albuquerque, NM), Claudet; Andre A. (Albuquerque, NM), Oliver; Andrew D. (Waltham, MA)
Sandia Corporation (Albuquerque, NM)
11/ 866,177
October 2, 2007
The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.