Skip to Content
Find More Like This
Return to Search

Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof

United States Patent

7,754,352
July 13, 2010
View the Complete Patent at the US Patent & Trademark Office
National Renewable Energy Laboratory - Visit the NREL Technology Transfer Website
Metal oxide thin films and production thereof are disclosed. An exemplary method of producing a metal oxide thin film may comprise introducing at least two metallic elements and oxygen into a process chamber to form a metal oxide. The method may also comprise depositing the metal oxide on a substrate in the process chamber. The method may also comprise simultaneously controlling a ratio of the at least two metallic elements and a stoichiometry of the oxygen during deposition. Exemplary amorphous metal oxide thin films produced according to the methods herein may exhibit highly transparent properties, highly conductive properties, and/or other opto-electronic properties.
Perkins; John (Boulder, CO), Van Hest; Marinus Franciscus Antonius Maria (Lakewood, CO), Ginley; David (Evergreen, CO), Taylor; Matthew (Golden, CO), Neuman; George A. (Holland, MI), Luten; Henry A. (Holland, MI), Forgette; Jeffrey A. (Hudsonville, MI), Anderson; John S. (Holland, MI)
Alliance for Sustainable Energy, LLC (Golden, CO)
11/ 738,344
20080261070
April 20, 2007
CONTRACTUAL ORIGIN The United States Government has rights in this invention under Contract No. DE-AC36-99GO10337 between the United States Department of Energy and the National Renewable Energy Laboratory, a Division of the Midwest Research Institute.