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Microfabricated bulk wave acoustic bandgap device

United States Patent

June 8, 2010
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 .mu.m or less).
Olsson; Roy H. (Albuquerque, NM), El-Kady; Ihab F. (Albuquerque, NM), McCormick; Frederick (Albuquerque, NM), Fleming; James G. (Albuquerque, NM), Fleming, legal representative; Carol (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
11/ 748,832
May 15, 2007
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DEAC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.