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Microelectromechanical tunable inductor

United States Patent

May 4, 2010
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by side and coiled up about a central axis which is parallel to a supporting substrate. An in-plane stress gradient is responsible for coiling up the coils which. The inductance provided by the tunable inductor can be electrostatically changed either continuously or in discrete steps using electrodes on the substrate and on each coil. The tunable inductor can be formed with processes which are compatible with conventional IC fabrication so that, in some cases, the tunable inductor can be formed on a semiconductor substrate alongside or on top of an IC.
Stalford; Harold L. (Norman, OK), Hietala; Vincent M. (Albuquerque, NM), Fleming; James G. (Albuquerque, NM), Fleming, legal representative; Carol (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
11/ 746,147
May 9, 2007
GOVERNMENT RIGHTS This invention was made with Government support under Contract No. DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.