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Synthesis of transparent conducting oxide coatings

United States Patent

May 4, 2010
View the Complete Patent at the US Patent & Trademark Office
A method and system for preparing a light transmitting and electrically conductive oxide film. The method and system includes providing an atomic layer deposition system, providing a first precursor selected from the group of cyclopentadienyl indium, tetrakis (dimethylamino) tin and mixtures thereof, inputting to the deposition system the first precursor for reaction for a first selected time, providing a purge gas for a selected time, providing a second precursor comprised of an oxidizer, and optionally inputting a second precursor into the deposition system for reaction and alternating for a predetermined number of cycles each of the first precursor, the purge gas and the second precursor to produce the oxide film.
Elam; Jeffrey W. (Elmhurst, IL), Martinson; Alex B. F. (Evanston, IL), Pellin; Michael J. (Naperville, IL), Hupp; Joseph T. (Northfield, IL)
UChicago Argonne, LLC (Chicago, IL)
11/ 804,059
May 16, 2007
The United States Government has certain rights in this invention pursuant to Contract No. DE-AC02-06CHI1357 between the United States Department of Energy and UChicago Argonne, LLC as operator of Argonne National Laboratories.