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Methods and devices for fabricating three-dimensional nanoscale structures

United States Patent

April 27, 2010
View the Complete Patent at the US Patent & Trademark Office
The present invention provides methods and devices for fabricating 3D structures and patterns of 3D structures on substrate surfaces, including symmetrical and asymmetrical patterns of 3D structures. Methods of the present invention provide a means of fabricating 3D structures having accurately selected physical dimensions, including lateral and vertical dimensions ranging from 10s of nanometers to 1000s of nanometers. In one aspect, methods are provided using a mask element comprising a conformable, elastomeric phase mask capable of establishing conformal contact with a radiation sensitive material undergoing photoprocessing. In another aspect, the temporal and/or spatial coherence of electromagnetic radiation using for photoprocessing is selected to fabricate complex structures having nanoscale features that do not extend entirely through the thickness of the structure fabricated.
Rogers; John A. (Champaign, IL), Jeon; Seokwoo (Champaign, IL), Park; Jangung (Urbana, IL)
The Board of Trustees of the University of Illinois (Urbana, IL)
11/ 001,689
December 1, 2004
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with Government support under Contract Number DEFG02-91ER45439 awarded by the Department of Energy (DOE). The Government has certain rights in the invention.