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Method of transferring strained semiconductor structure

United States Patent

December 29, 2009
View the Complete Patent at the US Patent & Trademark Office
The transfer of strained semiconductor layers from one substrate to another substrate involves depositing a multilayer structure on a substrate having surface contaminants. An interface that includes the contaminants is formed in between the deposited layer and the substrate. Hydrogen atoms are introduced into the structure and allowed to diffuse to the interface. Afterward, the deposited multilayer structure is bonded to a second substrate and is separated away at the interface, which results in transferring a multilayer structure from one substrate to the other substrate. The multilayer structure includes at least one strained semiconductor layer and at least one strain-induced seed layer. The strain-induced seed layer can be optionally etched away after the layer transfer.
Nastasi; Michael A. (Santa Fe, NM), Shao; Lin (College Station, TX)
Los Alamos National Security, LLC (Los Alamos, NM)
11/ 641,471
December 18, 2006
STATEMENT REGARDING FEDERAL RIGHTS This invention was made with government support under Contract No. DE-AC51-06NA25396 awarded by the U.S. Department of Energy. The government has certain rights in the invention.