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Method and system for treating an interior surface of a workpiece using a charged particle beam

United States Patent

July 28, 2009
View the Complete Patent at the US Patent & Trademark Office
A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.
Swenson; David Richard (Georgetown, MA)
TEL Epion Inc. (Billerica, MA)
11/ 752,774
May 23, 2007
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT The U.S. Government has a paid-up license in this invention and the right in limited circumstances to require the patent owner to license others on reasonable terms as provided for by the terms of Grant No. DE-FG02-04ER83944 awarded by the U.S. Department of Energy.