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Extended-range tiltable micromirror

United States Patent

May 5, 2009
View the Complete Patent at the US Patent & Trademark Office
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A tiltable micromirror device is disclosed in which a micromirror is suspended by a progressive linkage with an electrostatic actuator (e.g. a vertical comb actuator or a capacitive plate electrostatic actuator) being located beneath the micromirror. The progressive linkage includes a pair of torsion springs which are connected together to operate similar to a four-bar linkage with spring joints. The progressive linkage provides a non-linear spring constant which can allow the micromirror to be tilted at any angle within its range substantially free from any electrostatic instability or hysteretic behavior.
Allen; James J. (Albuquerque, NM), Wiens; Gloria J. (Newberry, FL), Bronson; Jessica R. (Gainesville, FL)
11/ 494,223
July 27, 2006
GOVERNMENT RIGHTS This invention was made with Government support under Contract No. DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.