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Method of using sacrificial materials for fabricating internal cavities in laminated dielectric structures

United States Patent

February 24, 2009
View the Complete Patent at the US Patent & Trademark Office
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Microfluidic Devices
A method of using sacrificial materials for fabricating internal cavities and channels in laminated dielectric structures, which can be used as dielectric substrates and package mounts for microelectronic and microfluidic devices. A sacrificial mandrel is placed in-between two or more sheets of a deformable dielectric material (e.g., unfired LTCC glass/ceramic dielectric), wherein the sacrificial mandrel is not inserted into a cutout made in any of the sheets. The stack of sheets is laminated together, which deforms the sheet or sheets around the sacrificial mandrel. After lamination, the mandrel is removed, (e.g., during LTCC burnout), thereby creating a hollow internal cavity in the monolithic ceramic structure.
Peterson; Kenneth A. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
10/ 768,329
January 30, 2004
FEDERALLY SPONSORED RESEARCH The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.