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Method and apparatus for creating a topography at a surface

United States Patent

November 11, 2008
View the Complete Patent at the US Patent & Trademark Office
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Methods and apparatus whereby an optical interferometer is utilized to monitor and provide feedback control to an integrated energetic particle column, to create desired topographies, including the depth, shape and/or roughness of features, at a surface of a specimen. Energetic particle columns can direct energetic species including, ions, photons and/or neutral particles to a surface to create features having in-plane dimensions on the order of 1 micron, and a height or depth on the order of 1 nanometer. Energetic processes can include subtractive processes such as sputtering, ablation, focused ion beam milling and, additive processes, such as energetic beam induced chemical vapor deposition. The integration of interferometric methods with processing by energetic species offers the ability to create desired topographies at surfaces, including planar and curved shapes.
Adams; David P. (Albuquerque, NM), Sinclair; Michael B. (Albuquerque, NM), Mayer; Thomas M. (Albuquerque, NM), Vasile; Michael J. (Albuquerque, NM), Sweatt; William C. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
11/ 478,573
June 29, 2006
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT The United States Government has certain rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.