A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported substantially parallel from said first electrode. Said second electrode is movable with respect to said first electrode whereby an electric potential applied between said first and second electrodes causing said second electrode to move relative to said first electrode a distance X, (X), where X is a nonlinear function of said potential, (V). Means are provided for linearizing the relationship between V and X.
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
This invention was made with Government Support under Contract Number W-7405-ENG-48 awarded by the Department of Energy. The Government has certain rights in the invention.