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Method for linearizing deflection of a MEMS device using binary electrodes and voltage modulation

United States Patent

June 10, 2008
View the Complete Patent at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
A micromechanical device comprising one or more electronically movable structure sets comprising for each set a first electrode supported on a substrate and a second electrode supported substantially parallel from said first electrode. Said second electrode is movable with respect to said first electrode whereby an electric potential applied between said first and second electrodes causing said second electrode to move relative to said first electrode a distance X, (X), where X is a nonlinear function of said potential, (V). Means are provided for linearizing the relationship between V and X.
Horenstein; Mark N. (West Roxbury, MA)
Trustees of Boston University (Boston, MA)
10/ 506,654
March 10, 2003
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with Government Support under Contract Number W-7405-ENG-48 awarded by the Department of Energy. The Government has certain rights in the invention.