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Gas sensor with attenuated drift characteristic

United States Patent

7,370,511
May 13, 2008
View the Complete Patent at the US Patent & Trademark Office
A sensor with an attenuated drift characteristic, including a layer structure in which a sensing layer has a layer of diffusional barrier material on at least one of its faces. The sensor may for example be constituted as a hydrogen gas sensor including a palladium/yttrium layer structure formed on a micro-hotplate base, with a chromium barrier layer between the yttrium layer and the micro-hotplate, and with a tantalum barrier layer between the yttrium layer and an overlying palladium protective layer. The gas sensor is useful for detection of a target gas in environments susceptible to generation or incursion of such gas, and achieves substantial (e.g., >90%) reduction of signal drift from the gas sensor in extended operation, relative to a corresponding gas sensor lacking the diffusional barrier structure of the invention.
Chen; Ing-Shin (Danbury, CT), Dimeo, Jr.; Frank (Danbury, CT), Chen; Philip S. H. (Bethel, CT), Neuner; Jeffrey W. (Bethel, CT), Welch; James (Fairfield, CT), Hendrix; Bryan (Danbury, CT)
MST Technology GmbH (DE)
10/ 795,529
March 8, 2004
GOVERNMENT RIGHTS IN INVENTION Work related to the invention hereof was conducted in the performance of Department of Energy Contract No. DE-FC36-99GO10451. The Government has certain rights in the invention.