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Polymer-assisted deposition of films

United States Patent

April 29, 2008
View the Complete Patent at the US Patent & Trademark Office
Los Alamos National Laboratory - Visit the Technology Transfer Division Website
PAD: Polymer-Assisted Deposition of Metal-Oxide and Metal-Nitride Films
A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.
McCleskey; Thomas M. (Los Alamos, NM), Burrell; Anthony K. (Los Alamos, NM), Jia; Quanxi (Los Alamos, NM), Lin; Yuan (Los Alamos, NM)
Los Alamos National Security, LLC (Los Alamos, NM)
10/ 616,479
July 8, 2003
STATEMENT REGARDING FEDERAL RIGHTS This invention was made with government support under Contract No. W-7405-ENG-36 awarded by the U.S. Department of Energy. The government has certain rights in the invention.