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Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates

United States Patent

March 11, 2008
View the Complete Patent at the US Patent & Trademark Office
Idaho National Laboratory - Visit the Technology Transfer and Commercialization Office Website
The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.
Branagan; Daniel J. (Idaho Falls, ID), Hyde; Timothy A. (Idaho Falls, ID), Fincke; James R. (Los Alamos, NM)
Battelle Energy Alliance, LLC (Idaho Falls, ID)
10/ 918,287
August 13, 2004
CONTRACTUAL ORIGIN OF THE INVENTION The United States Government has rights in the following invention pursuant to Contract No. DE-AC07-99ID13727 between the U.S. Department of Energy and Bechtel BWXT Idaho, LLC.