A method and apparatus to generate a beam of coherent light including x-rays or XUV by colliding a high-intensity laser pulse with an electron beam that is accelerated by a synchronized laser pulse. Applications include x-ray and EUV lithography, protein structural analysis, plasma diagnostics, x-ray diffraction, crack analysis, non-destructive testing, surface science and ultrafast science.
GOVERNMENT'S RIGHT CLAUSE
This invention was made with government support provided by the Department of Energy (Grant No. DE-FG02-96ER14685) and Office of Naval Research (Grant No. N00014-01-1-0849). The government has certain rights in the invention.