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Silicon fiber optic sensors

United States Patent

October 2, 2007
View the Complete Patent at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
A Fabry-Perot cavity is formed by a partially or wholly reflective surface on the free end of an integrated elongate channel or an integrated bounding wall of a chip of a wafer and a partially reflective surface on the end of the optical fiber. Such a constructed device can be utilized to detect one or more physical parameters, such as, for example, strain, through the optical fiber using an optical detection system to provide measuring accuracies of less than aboutb0.1%.
Pocha; Michael D. (Livermore, CA), Swierkowski; Steve P. (Livermore, CA), Wood; Billy E. (Livermore, CA)
The Regents of the University of California (Oakland, CA)
11/ 132,663
May 18, 2005
The United States Government has rights in this invention pursuant to Contract No. W-7405-ENG-48 between the United States Department of Energy and the University of California for the operation of Lawrence Livermore National Laboratory.