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Method for plasma formation for extreme ultraviolet lithography-theta pinch

United States Patent

February 20, 2007
View the Complete Patent at the US Patent & Trademark Office
Argonne National Laboratory - Visit the Technology Development and Commercialization Website
A device and method for generating extremely short-wave ultraviolet electromagnetic wave, utilizing a theta pinch plasma generator to produce electromagnetic radiation in the range of 10 to 20 nm. The device comprises an axially aligned open-ended pinch chamber defining a plasma zone adapted to contain a plasma generating gas within the plasma zone; a means for generating a magnetic field radially outward of the open-ended pinch chamber to produce a discharge plasma from the plasma generating gas, thereby producing a electromagnetic wave in the extreme ultraviolet range; a collecting means in optical communication with the pinch chamber to collect the electromagnetic radiation; and focusing means in optical communication with the collecting means to concentrate the electromagnetic radiation.
Hassanein; Ahmed (Naperville, IL), Konkashbaev; Isak (Bolingbrook, IL), Rice; Bryan (Hillsboro, OR)
The United States of America as represented by the United States Department of Energy (Washington, DC), N/A (
11/ 066,655
February 22, 2005
CONTRACTUAL ORIGIN OF INVENTION The United States Government has rights in this invention pursuant to Contract No. W-31-109-ENG-38 between the U.S. Department of Energy and the University of Chicago representing Argonne National Laboratory and under other contracts with Argonne.