A novel pulsed, neutralized ion beam source is provided. The source uses pulsed inductive breakdown of neutral gas, and magnetic acceleration and control of the resulting plasma, to form a beam. The beam supplies ions for applications requiring excellent control of ion species, low remittance, high current density, and spatial uniformity.
ACKNOWLEDGMENT OF GOVERNMENT SUPPORT
This invention was made with Government support under Grant No. DE-FG02-01ER83147, awarded by the Department of Energy. The government has certain rights in the invention.