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Laser diffraction process and apparatus for width measurement of elongated objects

United States Patent

July 4, 2006
View the Complete Patent at the US Patent & Trademark Office
Size distribution of elongated objects is measured by forward scattering radiation from the objects at a range of scatter angles. The scattered radiation is refracted to locations on a scatter detector based on the scatter angles and independent of the location of the objects along the radiation axis. The intensity of radiation is sensed at each position on the scatter detector, and signals representative of the intensities at the positions are processed and compared to masks to identify a size distribution. The scatter detector may include individual radiation detectors arranged to receive refracted radiation representing respective ranges of scatter angles to thereby compensate for lower radiation intensities scattered from smaller objects.
Naqwi; Amir A. (Shoreview, MN), Fandrey; Christopher W. (Shoreview, MN)
Powerscope Incorporated (Minneapolis, MN)
10/ 413,675
April 15, 2003
STATEMENT REGARDING FEDERALLY SPONSERED RESEARCH OR DEVELOPMENT This Invention was made with Government support under Contract No. DE-FC36-02GO12063 awarded by the Department of Energy. The government has certain rights in this invention.