A non-contacting capacitive diagnostic device includes a pulsed light source for producing an electric field in a semiconductor or photovoltaic device or material to be evaluated and a circuit responsive to the electric field. The circuit is not in physical contact with the device or material being evaluated and produces an electrical signal characteristic of the electric field produced in the device or material. The diagnostic device permits quality control and evaluation of semiconductor or photovoltaic device properties in continuous manufacturing processes.
This invention was made with Government support under NREL Subcontract No. ZAX-8-17647-09, prime contract DE-AC36-99GO10337 awarded by the Department of Energy. The Government has certain rights in this invention.