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Ring laser scatterometer

United States Patent

June 28, 2005
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A scatterometer utilizes the dead zone resulting from lockup caused by scatter from a sample located in the optical path of a ring laser at a location where counter-rotating pulses cross. The frequency of one pulse relative to the other is varied across the lockup dead zone.
Ackermann; Mark (Albuquerque, NM), Diels; Jean-Claude (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
10/ 390,508
March 17, 2003
The United States Government has rights in this invention pursuant to Department of Energy Contract No. DF-AC04-94AL85000 with Sandia Corporation.