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System level analysis and control of manufacturing process variation

United States Patent

May 31, 2005
View the Complete Patent at the US Patent & Trademark Office
Los Alamos National Laboratory - Visit the Technology Transfer Division Website
A computer-implemented method is implemented for determining the variability of a manufacturing system having a plurality of subsystems. Each subsystem of the plurality of subsystems is characterized by signal factors, noise factors, control factors, and an output response, all having mean and variance values. Response models are then fitted to each subsystem to determine unknown coefficients for use in the response models that characterize the relationship between the signal factors, noise factors, control factors, and the corresponding output response having mean and variance values that are related to the signal factors, noise factors, and control factors. The response models for each subsystem are coupled to model the output of the manufacturing system as a whole. The coefficients of the fitted response models are randomly varied to propagate variances through the plurality of subsystems and values of signal factors and control factors are found to optimize the output of the manufacturing system to meet a specified criterion.
Hamada; Michael S. (Los Alamos, NM), Martz; Harry F. (Los Alamos, NM), Eleswarpu; Jay K. (West Chester, OH), Preissler; Michael J. (Maineville, OH)
The Regents of the University of California (Los Alamos, NM)
10/ 191,202
July 9, 2002
STATEMENT REGARDING FEDERAL RIGHTS This invention was made with government support under Contract No. W-7405-ENG-36 awarded by the U.S. Department of Energy and CRADA No. LA99C10420-A002. The government has certain rights in the invention.