Skip to Content
Find More Like This
Return to Search

Growth of multi-component alloy films with controlled graded chemical composition on sub-nanometer scale

United States Patent

March 15, 2005
View the Complete Patent at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
The chemical composition of thin films is modulated during their growth. A computer code has been developed to design specific processes for producing a desired chemical composition for various deposition geometries. Good agreement between theoretical and experimental results was achieved.
Bajt; Sasa (Livermore, CA), Vernon; Stephen P. (Pleasanton, CA)
EUV Limited Liability Corporation (Santa Clara, CA)
10/ 256,324
September 27, 2002
The United States Government has rights in this invention pursuant to Contract No. W-7405-ENG48 between the United States Department of Energy and the University of California for the operation of Lawrence Livermore National Laboratory.