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Apparatus for generating partially coherent radiation

United States Patent

6,859,263
February 22, 2005
View the Complete Patent at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
Techniques for generating partially coherent radiation and particularly for converting effectively coherent radiation from a synchrotron to partially coherent EUV radiation suitable for projection lithography.
Naulleau; Patrick P. (Oakland, CA)
EUV LLC (Santa Clara, CA)
10/ 377,947
20030174303
February 28, 2003
The U.S. Government has certain rights in this invention pursuant to Contract No. DE-AC03-76SF00098 between the United States Department of Energy and the University of California for the operation of the Lawrence Berkeley National Laboratory.